Multi-Zone Tube Furnace

The tube furnace is split with two, three or five heating zones, which can achieve faster heating up to 1200℃ and create a different thermal gradient by adjust different heating zone temperature. It is excellent furnace to prepare functional materials under thermal gradient, epitaxial film growth by CVD or PVD with a vacuum system, and also can be used for annealing, diffusing and sintering sample in various atmospheres



  • Ⅰ. Technical Specifications
  • Max. temperature
  • 1200℃ (<2 hours)
  • Working temperature
  • 700-1100℃
  • Standard Temperature controlling
  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 51 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  •  Over temperature protection and alarm allows for operation without attendant.
  • Optional of Temperature controlling
  • Software (Furnace can be operated by PC by installing a control software)
  • Touch screen temperature controller
  • Temperature accuracy
  • ±1 ℃
  • Heating rate
  • <20 ℃/min
  • Thermocouple
  • K type (Pt-Rh) with 99.7% purity Alumina tube
  • Heating element
  • Fe-Mo-Cr sprial wire
  • Furnace Chamber
  • Two layers of ceramic fiber insulation materials
  • First layer: 1430 ℃ ceramic fiber board
  • Second layer: 1260 ℃ ceramic fiber board
  • Furnace structure
  • Double layer steel casing with dual cooling fan, surface temperature below 60 ℃.
  • Vacuum system
  • Double stage rotary vane vacuum pump with magnetic valve to prevent the oil absorbed to tube.
  • Self-expansion type double silicon ring flange, 304 stainless steel HCP.
  • Needle valve + Mechanical vacuum gauge + Discharge valve
  • Warranty
  • One year limited warranty with lifetime support. (Consumable parts such as heating elements and crucibles are not covered by the warranty, please order the replacement at related products)
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of One Year Limited Warranty.
  • Certifications
  • CE
  • Ⅱ. Application Notes   
  • Using Attentions
  • Cooling rate shall also not exceed 5℃ /min.
  • Toxic or explosive gases are not recommended for use with this furnace without necessary safety controls and supervision.
  • Small cracks may appear on the surface of the refractory ceramics over extended use.
  • The tube furnace is avoid use vacuum above 1500℃, otherwise the tube will be serious deformation.

Our Standard Models